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1 kW fiber Pused Laser Deposition setup
Project type:
Industrial PLD system
Date:
2018
- ● Dimensions: 1070x697x608 mm;
● Development of a 1-KW PLD machine;
● Mechatronic 2 axis positioning system for target node;
● Automatic control of the target position during its sputtering;
● Unique window protection system against dusting;
● Thermal shield to protect the target rotation spindle;
● Ultimate vacuum in the chamber is not worse than 10-6 mbar.
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