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Mini PLD system
Place:
The system was build for special materials deposition project by University team
Date:
2019
Project type:
PLD system
- ● UHV up to 5*10-8 mbar;
● Eleptical reflector IR heater, sample temperature up to 800 C;
● Adjustable substrate-target distance;
● Chemical polished vacuum chamber;
● Adjustable door hinges;
● Simultaneous heating and sample rotation;
● Target holder for 4 positions;
● Sample pyrometer bracket.
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